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N-type doping of 4H-SiC with phosphorus Co-implanted with C or Si

✍ Scribed by L. Zhu; Z. Li; T. P. Chow

Book ID: 107452639
Publisher: Springer US
Year: 2001
Tongue: English
Weight: 340 KB
Volume: 30
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-001-0077-0

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