✦ LIBER ✦
Room light anodic etching of highly doped n-type 4 H-SiC in high-concentration HF electrolytes: Difference between C and Si crystalline faces
✍ Scribed by Gael Gautier, Frederic Cayrel, Marie Capelle, Jérome Billoué, Xi Song, Jean-Francois Michaud
- Book ID
- 119906001
- Publisher
- Springer-Verlag
- Year
- 2012
- Tongue
- English
- Weight
- 904 KB
- Volume
- 7
- Category
- Article
- ISSN
- 1931-7573
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