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N+ ion implantation effects on microhardness and adhesion in TiO2 films

✍ Scribed by K. Fukushima; I. Yamada

Book ID: 113287276
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 428 KB
Volume: 112
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)01249-4

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