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Multiple-angle-of-incidence ellipsometry

✍ Scribed by Jenkins, T E


Book ID
117990155
Publisher
Institute of Physics
Year
1999
Tongue
English
Weight
209 KB
Volume
32
Category
Article
ISSN
0022-3727

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Multiple-angle-of-incidence ellipsometry
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In this paper we present results of multiple-angle-of-incidence (MAI) ellipsometry for strained GaAs/GaP x As 1-x superlattices (SL) with the composition x ΒΌ 0.4 and with different layer thickness in the range of 8-80 nm. SLs have been grown on the GaAs (100) substrates by chemical vapour deposition

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