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Multilevel Suspended Thin-Film Inductors on Silicon Wafers

✍ Scribed by Chih-Ming Tai; Chien-Neng Liao

Book ID: 114618738
Publisher: IEEE
Year: 2007
Tongue: English
Weight: 356 KB
Volume: 54
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2007.896347

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