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Multilayer coated reflective optics for Extreme UV lithography

✍ Scribed by E. Louis; H.-J. Voorma; N.B. Koster; F. Bijkerk; Yu.Ya. Platonov; S.Yu. Zuev; S.S. Andreev; E.A. Shamov; N.N. Salashchenko

No coin nor oath required. For personal study only.

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