𝔖 Bobbio Scriptorium
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Multi electron beam lithography: Fabrication of a control unit

✍ Scribed by U. Schnakenberg; W. Benecke; V. Wallendszus; K.P. Müller; A. Heuberger; B. Lischke


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
443 KB
Volume
9
Category
Article
ISSN
0167-9317

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