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Multi-component material sputtering by hollow cathode discharge

✍ Scribed by V. Gencheva; R. Djulgerova; V. Mihailov; A. Stoyanova-Ivanova; T. Dohnalik

Book ID: 105721227
Publisher: Springer
Year: 2004
Tongue: English
Weight: 226 KB
Volume: 54
Category: Article
ISSN: 0011-4626
DOI: 10.1007/bf03166506

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