✦ LIBER ✦
Sputtering—atomizing and optogalvanic properties of an Ar–Mg Hollow cathode discharge
✍ Scribed by D Zhechev; S Atanassova
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 271 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0042-207X
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✦ Synopsis
The atomisation and optogalvanic (OG) properties of Ar-Mg a hollow cathode discharge (HCD) plasma are analysed. Under operating conditions of an Ar gas pressure of 39.8 Pa and a discharge current of 10 mA the real sputtering coefficient and the density of the magnesium atoms are calculated to be S k = 3×10 -2 atoms per ion and 1.45×10 11 cm -3 respectively. The characteristics and a new point of view of the OG signal from the Ar + ion are discussed.