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Preparation of YBCO thin films by means of a hollow cathode discharge sputtering device

✍ Scribed by F. Ludwig; V. Hinkel; T. Schurig; J.-P. Müller; U. Stösslein; H.-U. Müller; H. Koch


Book ID
108024956
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
283 KB
Volume
180
Category
Article
ISSN
0921-4534

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Superconductor MgB 2 thin films with thickness 200 nm were prepared on sapphire substrates by co-deposition of boron and magnesium. Precursor MgB thin films were deposited from two independent magnetron sources-boron by rf magnetron sputtering and magnesium by dc magnetron sputtering. MgB precursor