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Multi-chamber dry etching of aluminium

✍ Scribed by I Hussla; G Castrischer; H Grünwald; G Lorenz; T-M Pang; H Ramisch; P Banks; W Pilz; H-C Scheer

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 933 KB
Volume: 38
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(88)90484-8

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