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Mueller matrix spectroscopic ellipsometry: formulation and application

✍ Scribed by A. Laskarakis; S. Logothetidis; E. Pavlopoulou; M. Gioti


Book ID
113936658
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
833 KB
Volume
455-456
Category
Article
ISSN
0040-6090

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## Abstract In this work we characterized two bidimensional gratings consisting each of a square array of square holes etched in a photoresist layer deposited on silicon. Data were taken on both samples with a spectroscopic UV–VIS ellipsometer (SE) operated at 70Β° incidence and zero azimuth (with t