## Abstract In this work we characterized two bidimensional gratings consisting each of a square array of square holes etched in a photoresist layer deposited on silicon. Data were taken on both samples with a spectroscopic UV–VIS ellipsometer (SE) operated at 70° incidence and zero azimuth (with t
Characterization of bidimensional gratings by spectroscopic ellipsometry and angle-resolved Mueller polarimetry
✍ Scribed by Kaplan, Bernard ;Novikova, Tatiana ;De Martino, Antonello ;Drévillon, Bernard
- Book ID
- 115351270
- Publisher
- The Optical Society
- Year
- 2004
- Tongue
- English
- Weight
- 890 KB
- Volume
- 43
- Category
- Article
- ISSN
- 1559-128X
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