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Morphology and properties of sputtered TiN layers as a function of substrate temperature and sputtering pressure

✍ Scribed by Uwe Kopacz; Hermann A. Jehn

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 555 KB
Volume: 126
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(85)90320-7

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