Thin film composites of nanocrystalline
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Lakshman Randeniya; Avi Bendavid; Phil Martin; Julie Cairney; Anna Sullivan; Ste
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Article
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2010
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Elsevier Science
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English
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We report on the synthesis of thin composites of diamond-like carbon (DLC) and nanocrystalline ZrO 2 deposited using pulsed direct current plasma-enhanced chemical vapor deposition at low temperatures (<120 ยฐC). Films containing up to 21 at.% Zr were prepared (hydrogen was not included in the calcul