Improved adhesion, growth and maturation
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Kopecek, Milan ;Bacakova, Lucie ;Vacik, Jiri ;Fendrych, Frantisek ;Vorlicek, Vla
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Article
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2008
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John Wiley and Sons
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English
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## Abstract Nanocrystalline diamond (NCD) films were deposited on microscopic glass slides using the MW PECVD method (20 Torr, 710 ยฐC, 0.8โ1% CH~4~). After the growth period, the films were oxidized and subsequently hydrogenated, and some of them were doped with boron (NCDโB; 3,000โ30,000 ppm B:C;