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Monolithic integration of detectors and transistors on high-resistivity silicon

✍ Scribed by Gian-Franco Dalla Betta; Giovanni Batignani; Maurizio Boscardin; Luciano Bosisio; Paolo Gregori; Lucio Pancheri; Claudio Piemonte; Lodovico Ratti; Giovanni Verzellesi; Nicola Zorzi


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
224 KB
Volume
579
Category
Article
ISSN
0168-9002

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✦ Synopsis


We report on the most recent results from an R&D activity aimed at the development of silicon radiation detectors with embedded front-end electronics. The key features of the fabrication technology and the available active devices are described. Selected results from the characterization of transistors and test structures are presented and discussed, and the considered application fields are addressed.


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