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Molecular hydrogen chemisorption on thin unsintered gold films deposited at low temperature

✍ Scribed by L. Stobiński; R. Duś

Book ID
118365861
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
674 KB
Volume
298
Category
Article
ISSN
0039-6028

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Epitaxial growth of ZnO thin films on Al
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## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al