Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass

✍ Scribed by Wang, Linqing; Wang, Weiyan; Huang, Jinhua; Zeng, Yuheng; Tan, Ruiqin; Song, Weijie; Chen, Jianmin

• Book ID: 121691549
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 835 KB
• Volume: 388
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2014.01.038