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Molecular dynamic simulation on boron cluster implantation for shallow junction formation

✍ Scribed by Li Yuan; Min Yu; Wei Li; Huihui Ji; Liming Ren; Kai Zhan; Ru Huang; Xing Zhang; Yangyuan Wang; Jinyu Zhang; Hideki Oka


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
268 KB
Volume
251
Category
Article
ISSN
0168-583X

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