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Molecular beam study on scattering and sticking of molecular oxygen at Si(100)

✍ Scribed by T. Miyake; S. Soeki; H. Kato; T. Nakamura; A. Namiki; H. Kamba; T. Suzaki

Book ID: 118364148
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 743 KB
Volume: 242
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(91)90296-5

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