Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor

✍ Scribed by Bülow, Tim; Gargouri, Hassan; Siebert, Mirko; Rudolph, Rolf; Johannes, Hans-Hermann; Kowalsky, Wolfgang

• Book ID: 125401386
• Publisher: Springer-Verlag
• Year: 2014
• Tongue: English
• Weight: 248 KB
• Volume: 9
• Category: Article
• ISSN: 1931-7573
• DOI: 10.1186/1556-276X-9-223