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Modified atomic layer deposition of RuO[sub 2] thin films for capacitor electrodes

✍ Scribed by Kim, Jin-Hyock; Kil, Deok-Sin; Yeom, Seung-Jin; Roh, Jae-Sung; Kwak, Noh-Jung; Kim, Jin-Woong

No coin nor oath required. For personal study only.

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