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Modification-scanning X-ray microscopy of semiconductor structures using Kumakhov optics

✍ Scribed by A. Yu. Romanov

Book ID
111449339
Publisher
SP MAIK Nauka/Interperiodica
Year
2006
Tongue
English
Weight
128 KB
Volume
32
Category
Article
ISSN
1063-7850

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## Abstract In X‐ray beam induced current (XBIC) in combination with X‐ray fluorescence (XRF) and X‐ray absorption (XAS) microscopy techniques is now widely used as a powerful tool for the investigation of transition metal (TM) behavior in Si. The aim of this work was to replace XBIC with a new rec