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The use of x-ray capillary optics for lithography and microscopy

โœ Scribed by V. A. Arkadiev; H. -E. Gorny; D. I. Gruev; A. A. Karnaukhov; A. I. Kolomiitsev; M. A. Kumakhov; N. Langhoff; D. V. Shandintsev; R. Wedell

Publisher
Springer
Year
1996
Tongue
English
Weight
306 KB
Volume
28
Category
Article
ISSN
0306-8919

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โœ Tianxi Sun; Zhiguo Liu; Yude Li; Guanghua Zhu; Xiaoyan Lin; Ping Luo; Qiuli Pan; ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 226 KB

The performances of capillary X-ray optics (CXRO) for confocal three-dimensional micro-X-ray fluorescence (3D Micro-XRF) technology are presented. In particular, the energy dependence of the collecting angle and input focal spot size of the polycapillary parallel X-ray lens (PPXRL), and the energy d