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Modification of the structure and hydrogen content of amorphous hydrogenated silicon films under conditions of femtosecond laser-induced crystallization

✍ Scribed by Emelyanov, A. V.; Kazanskii, A. G.; Kashkarov, P. K.; Konkov, O. I.; Kutuzov, N. P.; Lyaskovskii, V. L.; Forsh, P. A.; Khenkin, M. V.

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