Modelling of pulsed laser deposition of large area films
β Scribed by S.J Guilfoyle; M.D Crapper; M Lovelady; M Petty
- Book ID
- 114229606
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 139 KB
- Volume
- 198-199
- Category
- Article
- ISSN
- 0304-8853
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The pulsed laser ablation technique is a well-proved tool for deposition of multi-component materials such as ceramic superconductors, electro-optic or ferromagnetic oxides and other compounds of great interest for materials science and technology. As the capabilities of this technique have been dem
An arrangement for large area PLD on 3-inch wafers is proposed. For in-situ deposited YBCO thin films on rplane sapphire with YSZ buffer layer we inductively measured within 3 inch diameter values of the critical temperature Tc(90% ) from 85.9 K to 86.7 K and values of the critical current density j