An arrangement for large area PLD on 3-inch wafers is proposed. For in-situ deposited YBCO thin films on rplane sapphire with YSZ buffer layer we inductively measured within 3 inch diameter values of the critical temperature Tc(90% ) from 85.9 K to 86.7 K and values of the critical current density j
β¦ LIBER β¦
Large-area pulsed laser deposition of YBCO thin films: homogeneity and surface
β Scribed by B. Schey; W. Biegel; M. Kuhn; B. Stritzker
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 162 KB
- Volume
- 69
- Category
- Article
- ISSN
- 1432-0630
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