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Large area pulsed laser deposition of YBCO thin films on 3-inch wafers

✍ Scribed by M. Lorenz; H. Hochmuth; H. Börner; D. Natusch

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
136 KB
Volume
235-240
Category
Article
ISSN
0921-4534

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✦ Synopsis

An arrangement for large area PLD on 3-inch wafers is proposed. For in-situ deposited YBCO thin films on rplane sapphire with YSZ buffer layer we inductively measured within 3 inch diameter values of the critical temperature Tc(90% ) from 85.9 K to 86.7 K and values of the critical current density jc(77 K) from 1 x 106 to 2 x 106 A/cm 2. Large area PLD seems to be a very promising technique for homogeneous coating of 3-inch wafers by epitaxial oxide thin films.

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