Growth of SrTiO3 thin films by pulsed-laser deposition
โ Scribed by Masahiko Hiratani; Yoshinobu Tarutani; Tokuumi Fukazawa; Masakuni Okamoto; Kazumasa Takagi
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 454 KB
- Volume
- 227
- Category
- Article
- ISSN
- 0040-6090
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A pulsed Nd:YAG Laser was used to evaporate solid targets of KTiOAsO 4 (KTA) at power densities of 0.6 to 2.0ร10 9 W/cm 2 . KTA thin films were deposited on glass, Si (100). After proper annealing treatment, single phase, (orthorh-ombic) polycrystalline KTA thin films were obtained. Some propitious