Modeling the effects of cohesive energy for single particle on the material removal in chemical mechanical polishing at atomic scale

✍ Scribed by Yongguang Wang; Yongwu Zhao; Wei An; Jun Wang

• Book ID: 108060289
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 379 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.05.043