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Modeling the effect of power on the growth properties of microcrystalline silicon films in the high-pressure depletion regime

✍ Scribed by Li, Rui; Chen, Xiping; Chen, Yongsheng; Hao, Xiuli; Lu, Jingxiao; Yang, Shi-e


Book ID
122320217
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
556 KB
Volume
562
Category
Article
ISSN
0040-6090

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