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Modeling of profile effects for inductive helicon plasma sources

✍ Scribed by Mouzouris, Y.; Scharer, J.E.

Book ID: 117862748
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 946 KB
Volume: 24
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.491753

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