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Modeling of incorporation of oxygen and carbon impurities into multicrystalline silicon ingot during one-directional growth

โœ Scribed by Kentaro Kutsukake; Hideaki Ise; Yuki Tokumoto; Yutaka Ohno; Kazuo Nakajima; Ichiro Yonenaga


Book ID
116630236
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
446 KB
Volume
352
Category
Article
ISSN
0022-0248

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Incorporation behaviour of carbon and si
โœ J.M. Schneider; J. Ziegler; H. Heinecke ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 445 KB

Silicon and carbontetrabromide were used as dopant sources in the growth of GaAs/GaAs and Gao.47Inf).s3As/ lnP structures. We studied the incorporation behaviour of these group IV atoms on (100) and {111} surfaces as a function of growth temperature. The free carrier concentrations determined by Hal