✦ LIBER ✦

Modeling of etching process via kalman filter and channel length control

✍ Scribed by Ikuo Matsuba; Kuniaki Matsumoto; Kazunari Kobayashi

Book ID: 112076077
Publisher: John Wiley and Sons
Year: 1985
Tongue: English
Weight: 594 KB
Volume: 68
Category: Article
ISSN: 8756-663X
DOI: 10.1002/ecjb.4420680603

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