## Abstract A unified, macroscopic, oneβdimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf
β¦ LIBER β¦
Modeling of dielectric charging in electrostatic MEMS switches
β Scribed by A. Koszewski; F. Souchon; Ch. Dieppedale; T. Ouisse
- Book ID
- 104056451
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 768 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0026-2714
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