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Modeling of dielectric charging in electrostatic MEMS switches

✍ Scribed by A. Koszewski; F. Souchon; Ch. Dieppedale; T. Ouisse


Book ID
104056451
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
768 KB
Volume
50
Category
Article
ISSN
0026-2714

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## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf

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A unified, macroscopic, one-dimensional model is presented for the quantitative description of the process of dielectric charging in radio frequency micro-electromechanical systems (RF MEMS) switches. The fidelity of the model relies on the utilization of experimentally obtained data to assign value