Modeling of defects in integrated circuit photolithographic patterns : C. H. Stapper. IBM J. Res. Dev.28 (4), 461 (1984)

• Book ID: 103277170
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 131 KB
• Volume: 25
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(85)90282-3