Modeling of and experiments on dust particle levitation in the sheath of a radio frequency plasma reactor

✍ Scribed by Setyawan, Heru; Shimada, Manabu; Hayashi, Yutaka; Okuyama, Kikuo; Winardi, Sugeng

• Book ID: 126161896
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 397 KB
• Volume: 97
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1852696