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Monte Carlo-fluid hybrid model of the accumulation of dust particles at sheath edges in radio-frequency discharges

✍ Scribed by Sommerer, Timothy J.; Barnes, Michael S.; Keller, John H.; McCaughey, Michael J.; Kushner, Mark J.

Book ID: 121679372
Publisher: American Institute of Physics
Year: 1991
Tongue: English
Weight: 657 KB
Volume: 59
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.105409

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