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Modeling inductively coupled plasmas: The coil current boundary condition

✍ Scribed by Yu, Benjamin W.; Girshick, Steven L.

Book ID: 121343752
Publisher: American Institute of Physics
Year: 1991
Tongue: English
Weight: 907 KB
Volume: 69
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.347345

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