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Measurement of the induced plasma current in a planar coil, low-frequency, RF induction plasma source

โœ Scribed by El-Fayoumi, I M; Jones, I R

Book ID
121457348
Publisher
Institute of Physics
Year
1997
Tongue
English
Weight
239 KB
Volume
6
Category
Article
ISSN
0963-0252

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The electric field due to a strong capacitive coupling between the induction coil and the walls of the plasma chamber is quite large despite the discharge being in the H-mode in N 2 and H 2 gases. And as such, this field will interfere with the measurement of the magnetic field thus causing a high d