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Modeling and simulation of stress-induced leakage current in ultrathin SiO2 films

✍ Scribed by Ricco, B.; Gozzi, G.; Lanzoni, M.

Book ID: 114537363
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 213 KB
Volume: 45
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.701488

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