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Modeling and Analysis of the Nonrectangular Gate Effect for Postlithography Circuit Simulation

✍ Scribed by Singal, R.; Balijepalli, A.; Subramaniam, A.; Chi-Chao Wang; Liu, F.; Nassif, S.R.; Yu Cao


Book ID
118159775
Publisher
IEEE
Year
2010
Tongue
English
Weight
345 KB
Volume
18
Category
Article
ISSN
1063-8210

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## Abstract Recently we developed a model for symmetric double‐gate MOSFETs (SDDGM) that, for the first time, considers the doping concentration in the Si film in the complete range from 1Γ—10^14^ to 3Γ—10^18^ cm^βˆ’3^. The model covers a wide range of technological parameters and includes short channe