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Modeling and analysis of surface roughness effects on sputtering, reflection and sputtered particle transport

✍ Scribed by J.N. Brooks; D.N. Ruzic

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
436 KB
Volume
176-177
Category
Article
ISSN
0022-3115

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Sputtering-induced surface roughness is the main source of degradation of the depth resolution observed during depth proÐling of polycrystalline metals. Atomic force microscopy (AFM) images of polycrystalline Al Ðlms at di †erent mean sputtered depths are used to calculate both the depth distributio