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Modeling an inductively coupled plasma reactor with chlorine chemistry

✍ Scribed by Vitello, P.; Bardsley, J.N.; DiPeso, G.; Parker, G.J.

Book ID: 117862739
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 202 KB
Volume: 24
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.491743

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