Model of the dissolution of monomolecular photoresists
β Scribed by A. Barraud
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 489 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
Oxygen pressure or oxygen concentration? (some experiments with a polarographic multi-layer electrode system)
Decreasing feature size implies increased sensitivity to statistical fluctuations in various process parameters such as dose and the number of relevant bonds broken during post exposure bake. Here we develop a generic analytical model which accounts for essentially all these effects. The lowest orde
of some binuclear Cu(I1) complexes bridged by oxy anions. The ligands are prepared by a multistep route from phenol derivatives and provide tetracoordinate chelation in a manner that allows binding of an additional 'exogenous' ion to each copper. Magnetic susceptibility studies of the resulting bis(