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Model for micropipe formation in 6H-SiC single crystal by sublimation method

✍ Scribed by Junlin Liu; Jiqiang Gao; Jikuan Cheng; Jianfeng Yang; Guanjun Qiao


Book ID
113788841
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
445 KB
Volume
59
Category
Article
ISSN
0167-577X

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## Abstract Misoriented domains (MDs) are common defects in 6H‐SiC single crystals. We performed an experimental study on the formation of MDs in 2‐inch 6H‐SiC single crystals. Micro‐Raman spectroscopy revealed that the polytype of MDs was mainly 4H‐SiC. By changing growth conditions, it was found