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Model description and parameter extraction of on-chip spiral inductors for MMICs

✍ Scribed by W. Y. Yin; S. J. Pan; L. W. Li; Y. B. Gan

Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
216 KB
Volume
14
Category
Article
ISSN
1096-4290

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✦ Synopsis

A statistical description of the global performance of on-chip spiral inductors, based on extensive measurement is presented. These inductors were fabricated with different turn numbers or track lengths/track widths, but with the same spacing. From the S parameters measured using a de-embedding technique, the inductance L, Q factor, self-resonance frequency, and figure-of-merit indicator (FMI) of these inductors are determined. Various local scalable formulas are obtained in order to describe the features of these inductors. Based on extensive parametric studies, certain ways to improve these inductor performances can be found.

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