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MOCVD-growth of thin zinc oxide films from zinc acetylacetonate and air

โœ Scribed by Christian Pflitsch; Abdelkader Nebatti; Georg Brors; Burak Atakan


Book ID
116630274
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
423 KB
Volume
348
Category
Article
ISSN
0022-0248

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Epitaxial growth of zinc oxide thin film
โœ Chunming Jin; Roger Narayan; Ashutosh Tiwari; Honghui Zhou; Alex Kvit; Jagdish N ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 273 KB

Epitaxial zinc oxide thin films were grown on Si(1 1 1) using aluminum nitride and magnesium oxide/titanium nitride buffer layers. The resultant films were examined using transmission electron microscopy, X-ray diffraction, electrical conductivity, and photoluminescence spectroscopy. The following e