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Atomic layer epitaxy growth of doped zinc oxide thin films from organometals

✍ Scribed by Vesa Lujala; Jarmo Skarp; Markku Tammenmaa; Tuomo Suntola

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 826 KB
Volume: 82-83
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)90192-9

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